Nguyen Quang Huy NQH, Tran Thi Bao Linh TTBL, Phan Minh Tuan PMT. Yield Reliability Engineering in Semiconductor Manufacturing: Quantitative Control of Defectivity, Overlay, and Linewidth Under Process Drift. TECHNE J. 2025;1(2):75-87. Accessed March 14, 2026. https://ejournal.kalampractica.com/index.php/techne/article/view/17