NGUYEN QUANG HUY, Nguyen Quang Huy; TRAN THI BAO LINH, Tran Thi Bao Linh; PHAN MINH TUAN, Phan Minh Tuan. Yield Reliability Engineering in Semiconductor Manufacturing: Quantitative Control of Defectivity, Overlay, and Linewidth Under Process Drift. Techne: Journal of Engineering, Technology and Industrial Applications, [S. l.], v. 1, n. 2, p. 75–87, 2025. Disponível em: https://ejournal.kalampractica.com/index.php/techne/article/view/17. Acesso em: 14 mar. 2026.