Nguyen Quang Huy, Nguyen Quang Huy, Tran Thi Bao Linh Tran Thi Bao Linh, and Phan Minh Tuan Phan Minh Tuan. “Yield Reliability Engineering in Semiconductor Manufacturing: Quantitative Control of Defectivity, Overlay, and Linewidth Under Process Drift”. Techne: Journal of Engineering, Technology and Industrial Applications 1, no. 2 (June 4, 2025): 75–87. Accessed March 14, 2026. https://ejournal.kalampractica.com/index.php/techne/article/view/17.